S01400 - SEMI S14 - Safety Guideline for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment StdTpc-Photoresist 이 표준은 기술적으로 Global Information

이 표준은 기술적으로 Global Information & Control Technical Committee에 의해 승인되었으며

it has become of interest to standardize additional properties of the wafers

This Guide provides criteria for measurement methodology for micro-bump dimensions

and unintentionally added dopants

2-0211 (Reapproved 0623)

S01400 - SEMI S14 - Safety Guideline for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment StdTpc-Photoresist 이 표준은 기술적으로 Global InformationThis Safety Guideline provides considerations to the manufacturers of semiconductor manufacturing equipment that will assist them in assessing and mitigating the risk to equipment and product associated with fire and combustion by products. Although this Safety Guideline is written in the form of an assessment tool, it is intended for use throughout the design and development of semiconductor manufacturing equipment. This Safety Guideline may also be